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1

Metrology for stepper illumination pupil profile

Perçin, Gökhan

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2006

Language:

english

File:

PDF, 2.10 MB

english, 2006

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Process and proximity correction, and verification for extreme ultraviolet lithography

Perçin, Gökhan, Naulleau, Patrick P., Dai, Huixiong, Huang, Hsu-Ting, Liu, Anwei, Mokhberi, Ali, Zheng, Xin, Ngai, Chris

Year:

2013

Language:

english

File:

PDF, 1.51 MB

english, 2013

3

Piezoelectrically actuated flextensional micromachined ultrasound transducers

Gökhan Perçin, Butrus T. Khuri-Yakub

Journal:

Year:

2002

Language:

english

File:

PDF, 549 KB

english, 2002

4

LRP4 Mutations Alter Wnt/β-Catenin Signaling and Cause Limb and Kidney Malformations in Cenani-Lenz Syndrome

Yun Li, Barbara Pawlik, Nursel Elcioglu, Mona Aglan, Hülya Kayserili, Gökhan Yigit, Ferda Percin, Frances Goodman, Gudrun Nürnberg, Asim Cenani, Jill Urquhart, Boi-Dinh Chung, Samira Ismail, Khalda Am

Journal:

The American Journal of Human Genetics

Year:

2010

Language:

english

File:

PDF, 1.35 MB

english, 2010

5

Erratum: “Controlled ink-jet printing and deposition of organic polymers and solid particles” [Appl. Phys. Lett. 73, 2375 (1998)]

Percin, Gokhan, Lundgren, Thomas S., Khuri-Yakub, Butrus T.

Journal:

Applied Physics Letters

Year:

1999

Language:

english

File:

PDF, 292 KB

english, 1999

6

Intravitreal tigecycline treatment in experimental Acinetobacter baumannii endophthalmitis

Horozoglu, Fatih, Metan, Gokhan, Sever, Ozkan, Percin, Duygu, Topal, Cumhur S, Gonen, Tansu, Keskinbora, Kadircan H, Topcu, Birol, Yanyali, Ates

Journal:

Journal of Chemotherapy

Year:

2012

Language:

english

File:

PDF, 250 KB

english, 2012

7

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA, United States (Sunday 22 February 1998)] Advances in Resist Technology and Processing XV - Resist deposition without spinning by using novel inkjet technology and direct lithography for MEMS

Percin, Gokhan, Soh, Tom H., Khuri-Yakub, Butrus T.

Year:

1998

Language:

english

File:

PDF, 3.66 MB

english, 1998

8

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs

Percin, Gokhan, Khuri-Yakub, Butrus T., French, Patrick J., Chau, Kevin H.

Year:

1998

Language:

english

File:

PDF, 2.17 MB

english, 1998

9

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Optical Microlithography XIX - Building a computational model for process and proximity compensation

Perçin, Gökhan, Flagello, Donis G., Huang, Hsu-Ting, Zach, Franz X., Sezginer, Apo, Mokhberi, Ali

Year:

2006

Language:

english

File:

PDF, 625 KB

english, 2006

10

SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Polygon-based compensation of proximity and density effects in photomask processes

Kageyama, Kiyoshi, Naber, Robert J., Kawahira, Hiroichi, Miyoko, Katsuyuki, Okuda, Yoshimitsu, Perçin, Gökhan, Sezginer, Apo, Carrero, Jesus, Zhu, Alan, Liu, Anwei

Year:

2007

Language:

english

File:

PDF, 581 KB

english, 2007

11

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Design and Process Integration for Microelectronic Manufacturing IV - Across field CD control improvement for critical level imaging: new applications for layout correction and optimization

Zach, Franz, Wong, Alfred K. K., Singh, Vivek K., Percin, Gökhan, Sezginer, Apo

Year:

2006

Language:

english

File:

PDF, 274 KB

english, 2006

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - Accurate optical CD profiler based on specialized finite element method

Carrero, Jesus, Perçin, Gökhan, Starikov, Alexander

Year:

2012

Language:

english

File:

PDF, 3.80 MB

english, 2012

13

SPIE Proceedings [SPIE 26th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 18 September 2006)] Photomask Technology 2006 - PPC model build methodology: sequential litho and etch verification

Mokhberi, Ali, Martin, Patrick M., Naber, Robert J., Kamat, Vishnu, Sezginer, Apo, Zach, Franz X., Perçin, Gökhan, Carrero, Jesus, Huang, Hsu-Ting

Year:

2006

Language:

english

File:

PDF, 687 KB

english, 2006

14

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Optical Microlithography XIX - Inverting pupil illumination from resist-based measurements

Perçin, Gokhan, Flagello, Donis G., Sezginer, Apo, Zach, Franz X.

Year:

2006

Language:

english

File:

PDF, 724 KB

english, 2006

15

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Optical Microlithography XXVII - Pattern-based full-chip process verification

Lai, Kafai, Erdmann, Andreas, Ying, Changsheng, Kwon, Yongjun, Fornari, Paul, Perçin, Gökhan, Liu, Anwei

Year:

2014

Language:

english

File:

PDF, 1.09 MB

english, 2014

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